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Ingo, G.M.
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1988
XPS investigation on amorphous silion nitride (a‐SiNx) chemical structure
,
Ingo, G.M.
,
Zacchetti N.
,
Della Sala Dario
, and
Coluzza C.
, Surface and Interface Analysis, Volume 12, Number 5, p.323-324, (1988)
